Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar.

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TextDescription: x, 603 pages : illustrationsISBN:

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Holdings
Item type	Current library	Home library	Call number	Status	Date due	Barcode
Book	Dept. of Optoelectronics Processing Center	Dept. of Optoelectronics	621.381 (Browse shelf(Opens below))	Available		DOP2644

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Includes bibliographical references and index.

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