Sputtering materials for VLSI and thin film devices / (Record no. 452166)
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000 -LEADER | |
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fixed length control field | 00616cam a22002057i 4500 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 9780815515937 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 0815515936 |
082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 621.381 |
100 1# - MAIN ENTRY--PERSONAL NAME | |
Personal name | Sarkar, Jaydeep |
245 10 - TITLE STATEMENT | |
Title | Sputtering materials for VLSI and thin film devices / |
Statement of responsibility, etc. | Jaydeep Sarkar. |
300 ## - PHYSICAL DESCRIPTION | |
Extent | x, 603 pages : |
Other physical details | illustrations ; |
504 ## - BIBLIOGRAPHY, ETC. NOTE | |
Bibliography, etc. note | Includes bibliographical references and index. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Microelectronics |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Cathode sputtering (Plating process) |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Integrated circuits |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Thin film devices |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Flat panel displays |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Sputtering (Physics) |
942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
Koha item type | Book |
Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
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Dept. of Optoelectronics | Dept. of Optoelectronics | Processing Center | 22/11/2019 | 621.381 | DOP2644 | 22/11/2019 | 22/11/2019 | Book |