Sputtering materials for VLSI and thin film devices / (Record no. 452166)

MARC details
000 -LEADER
fixed length control field 00616cam a22002057i 4500
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9780815515937
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0815515936
082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.381
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Sarkar, Jaydeep
245 10 - TITLE STATEMENT
Title Sputtering materials for VLSI and thin film devices /
Statement of responsibility, etc. Jaydeep Sarkar.
300 ## - PHYSICAL DESCRIPTION
Extent x, 603 pages :
Other physical details illustrations ;
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc. note Includes bibliographical references and index.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Microelectronics
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Cathode sputtering (Plating process)
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Integrated circuits
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Thin film devices
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Flat panel displays
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Sputtering (Physics)
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Book
Holdings
Withdrawn status Lost status Damaged status Not for loan Home library Current library Shelving location Date acquired Total Checkouts Full call number Barcode Date last seen Price effective from Koha item type
        Dept. of Optoelectronics Dept. of Optoelectronics Processing Center 22/11/2019   621.381 DOP2644 22/11/2019 22/11/2019 Book