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Sputtering materials for VLSI and thin film devices /

Sarkar, Jaydeep

Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar. - x, 603 pages : illustrations ;

Includes bibliographical references and index.

ISBN: 9780815515937 0815515936

Subjects--Topical Terms:
Microelectronics
Cathode sputtering (Plating process)
Integrated circuits
Thin film devices
Flat panel displays
Sputtering (Physics)

Dewey Class. No.: 621.381

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