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Dry etching for microelectronics

By: Material type: TextTextSeries: Publication details: North-Holland Physics Publishing Co., Amsterdam 1984Edition: Description: 299ISBN:
Subject(s): DDC classification:
  • 621.38173 POW-D
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Holdings
Item type Current library Home library Call number Status Date due Barcode
Book Book Dept. of Physics Processing Center Dept. of Physics 621.38173 POW-D (Browse shelf(Opens below)) Available PHY4285

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