Dry etching for microelectronics
Material type: TextSeries: Publication details: North-Holland Physics Publishing Co., Amsterdam 1984Edition: Description: 299ISBN:- 621.38173 POW-D
Item type | Current library | Home library | Call number | Status | Date due | Barcode | |
---|---|---|---|---|---|---|---|
Book | Dept. of Physics Processing Center | Dept. of Physics | 621.38173 POW-D (Browse shelf(Opens below)) | Available | PHY4285 |
Bejoy
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