Dry etching for microelectronics (Record no. 480100)

MARC details
000 -LEADER
fixed length control field 00422nam a2200181 4500
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number
Terms of availability
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.38173 POW-D
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Powell, Ronald A, Ed.
245 ## - TITLE STATEMENT
Title Dry etching for microelectronics
250 ## - EDITION STATEMENT
Edition statement
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. North-Holland Physics Publishing Co., Amsterdam
Date of publication, distribution, etc. 1984
300 ## - PHYSICAL DESCRIPTION
Extent 299
490 ## - SERIES STATEMENT
Series statement
500 ## - GENERAL NOTE
General note
590 ## - LOCAL NOTE (RLIN)
Local note Bejoy
Provenance (VM) [OBSOLETE]
Condition of individual reels (VM) [OBSOLETE]
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Semiconductors--Etching
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Book
Holdings
Withdrawn status Lost status Damaged status Not for loan Home library Current library Shelving location Date acquired Total Checkouts Full call number Barcode Date last seen Price effective from Koha item type
        Dept. of Physics Dept. of Physics Processing Center 06/01/2022   621.38173 POW-D PHY4285 24/09/2019 24/09/2019 Book