Microoptics / Stefan Sinzinger, Jürgen Jahns.
Material type: TextPublication details: Weinheim : Wiley-VCH, c2003.Edition: 2nd rev. and enlarged edDescription: xiv, 433 p. : illISBN:- 3527403558
- 621.381045
Item type | Current library | Home library | Call number | Status | Date due | Barcode | |
---|---|---|---|---|---|---|---|
Book | Dept. of Optoelectronics Processing Center | Dept. of Optoelectronics | 621.381045 SIN/M (Browse shelf(Opens below)) | Available | DOP606 |
Previous ed.: 1999.
Includes bibliographical references and index.
LITHOGRAPHIC FABRICATION TECHNOLOGY-diffrctive micro optics--integrated wave guide optics--Micro optical system--array illuminator
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