Microoptics /

Sinzinger, Stefan.

Microoptics / Stefan Sinzinger, Jürgen Jahns. - 2nd rev. and enlarged ed. - Weinheim : Wiley-VCH, c2003. - xiv, 433 p. : ill. ;

Previous ed.: 1999.

Includes bibliographical references and index.

LITHOGRAPHIC FABRICATION TECHNOLOGY-diffrctive micro optics--integrated wave guide optics--Micro optical system--array illuminator

3527403558


Integrated optics.
Optoelectronic devices.
Miniature electronic equipment.

621.381045