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Ion implantation/ by G. Dearnaley [and others]

Contributor(s): Material type: TextTextPublication details: Amsterdam, North-Holland Pub. Co.; New York, :American Elsevier, ,1973.Description: xv, 802 p. with illusISBN:
  • 0444104887 (American Elsevier)
Subject(s): DDC classification:
  • 530.41 DEA/I
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