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Ion implantation/

Ion implantation/ by G. Dearnaley [and others] - Amsterdam, New York, North-Holland Pub. Co.; :American Elsevier, ,1973. - xv, 802 p. with illus.

Includes bibliographies.

ISBN: 0444104887 (American Elsevier)

Subjects--Topical Terms:
Ion implantation.

Dewey Class. No.: 530.41 DEA/I

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