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Microlithography : science and technology / edited by James R. Sheats, Bruce W. Smith. by
Material type: Text Text
Publication details: New York : Marcel Dekker, c1998
Online access:
Availability: Items available for loan: Dept. of Optoelectronics (1)Call number: 621.381531 SHE/M.
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Microlithography: Science and technology by Series:
Edition: 2
Material type: Text Text
Publication details: CRC Press, Boca Raton 2007
Availability: Items available for loan: Dept. of Physics (1)Call number: 621.381531 SUZ-M2.
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