Microlithography : science and technology / edited by James R. Sheats, Bruce W. Smith.
Material type: TextPublication details: New York : Marcel Dekker, c1998.Description: xii, 780 p. : illISBN:- 0824799534 (alk. paper)
- 621.381531
Item type | Current library | Home library | Call number | Status | Date due | Barcode | |
---|---|---|---|---|---|---|---|
Book | Dept. of Optoelectronics Processing Center | Dept. of Optoelectronics | 621.381531 SHE/M (Browse shelf(Opens below)) | Available | DOP529 |
Includes bibliographical references and index.
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