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Optical lithography : here is why / Burn J. Lin.

By: Material type: TextTextPublication details: Bellingham, Wash. : SPIE, c2009.Description: xiv, 477 p. : illISBN:
  • 9780819475602
Subject(s): DDC classification:
  • 621.381531
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Holdings
Item type Current library Home library Collection Call number Status Date due Barcode
Book Book Dept. of Optoelectronics Processing Center Dept. of Optoelectronics Non-fiction 621.381531 LIN/O (Browse shelf(Opens below)) Available DOP1921

Includes index.

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