Optical lithography : here is why / Burn J. Lin.
Material type: TextPublication details: Bellingham, Wash. : SPIE, c2009.Description: xiv, 477 p. : illISBN:- 9780819475602
- 621.381531
Item type | Current library | Home library | Collection | Call number | Status | Date due | Barcode | |
---|---|---|---|---|---|---|---|---|
Book | Dept. of Optoelectronics Processing Center | Dept. of Optoelectronics | Non-fiction | 621.381531 LIN/O (Browse shelf(Opens below)) | Available | DOP1921 |
Includes index.
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