Optical lithography : (Record no. 454049)

MARC details
000 -LEADER
fixed length control field 00441cam a2200169 a 4500
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9780819475602
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.381531
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Lin, Burn Jeng,
245 10 - TITLE STATEMENT
Title Optical lithography :
Remainder of title here is why /
Statement of responsibility, etc. Burn J. Lin.
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. Bellingham, Wash. :
Name of publisher, distributor, etc. SPIE,
Date of publication, distribution, etc. c2009.
300 ## - PHYSICAL DESCRIPTION
Extent xiv, 477 p. :
Other physical details ill. ;
500 ## - GENERAL NOTE
General note Includes index.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Microlithography.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Semiconductors
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Lasers
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Book
Holdings
Withdrawn status Lost status Damaged status Not for loan Collection code Home library Current library Shelving location Date acquired Total Checkouts Full call number Barcode Date last seen Price effective from Koha item type
        Non-fiction Dept. of Optoelectronics Dept. of Optoelectronics Processing Center 28/04/2021   621.381531 LIN/O DOP1921 28/04/2021 28/04/2021 Book