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Microlithography : science and technology / edited by James R. Sheats, Bruce W. Smith. by
Material type: Text Text
Publication details: New York : Marcel Dekker, c1998
Online resources:
Availability: Items available for loan: Dept. of Optoelectronics (1)Call number: 621.381531 SHE/M.
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Optical lithography : here is why / Burn J. Lin. by
Material type: Text Text
Publication details: Bellingham, Wash. : SPIE, c2009
Availability: Items available for loan: Dept. of Optoelectronics (1)Call number: 621.381531 LIN/O.
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Handbook of VLSI microlithography : principles, technology, and applications/ edited by John N .Helbert by
Material type: Text Text
Publication details: Delhi: JAICO Publishing House, 2008
Availability: Items available for reference: Study Centre Alappuzha, University of Kerala: Not For Loan (1)Call number: 621.381531 HEL/H.
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