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Handbook of VLSI microlithography : principles, technology, and applications/ edited by John N .Helbert

By: Material type: TextTextPublication details: Delhi: JAICO Publishing House, 2008Description: xix,1001pISBN:
  • 9788179928998
Subject(s): DDC classification:
  • 621.381531 HEL/H
Summary: This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line e
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Holdings
Item type Current library Home library Call number Status Date due Barcode
Book Book Study Centre Alappuzha, University of Kerala Processing Center Study Centre Alappuzha, University of Kerala 621.381531 HEL/H (Browse shelf(Opens below)) Not For Loan USCA3818


This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line e

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