Handbook of VLSI microlithography : (Record no. 613496)

MARC details
000 -LEADER
fixed length control field 01095nam a22001577a 4500
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9788179928998
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.381531
Item number HEL/H
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Helbert,John N,ed.
245 ## - TITLE STATEMENT
Title Handbook of VLSI microlithography :
Remainder of title principles, technology, and applications/
Statement of responsibility, etc. edited by John N .Helbert
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. Delhi:
Name of publisher, distributor, etc. JAICO Publishing House,
Date of publication, distribution, etc. 2008
300 ## - PHYSICAL DESCRIPTION
Extent xix,1001p.
520 ## - SUMMARY, ETC.
Summary, etc. <br/>This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line e
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Microlithography
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Integrated Circuits
Form subdivision Very large scale Integration
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Book
Holdings
Withdrawn status Lost status Damaged status Not for loan Home library Current library Shelving location Date acquired Total Checkouts Full call number Barcode Date last seen Price effective from Koha item type
      Not For Loan Study Centre Alappuzha, University of Kerala Study Centre Alappuzha, University of Kerala Processing Center 09/09/2021   621.381531 HEL/H USCA3818 09/09/2021 09/09/2021 Book