Introductory MEMS : fabrication and applications / Thomas M. Adams, Richard A. Layton.
Material type:
TextPublication details: New York : Springer, c2010.Description: xv, 444 p. : ill. (some col.)ISBN: - 9780387095103 (hbk.)
- 0387095101 (hbk.)
- 9780387095110 (ebk.)
- 038709511X (ebk.)
- 621.381 ADA/I
| Item type | Current library | Home library | Collection | Call number | Status | Date due | Barcode | |
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Dept. of Optoelectronics Processing Center | Dept. of Optoelectronics | Non-fiction | 621.381 ADA/I (Browse shelf(Opens below)) | Available | DOP2727 |
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| 621.38 LAF/F Fundamental concepts in communication / | 621.38 TOO/P Principles of Radar/ | 621.38043 ORF/O Optimum signal processing : an introduction / | 621.381 ADA/I Introductory MEMS : fabrication and applications / | 621.381 ARN/P Piezoelectric transducers and applications / | 621.381 AWS/S Semiconductor spintronics and quantum computation / | 621.381 BAN/I Introduction to spintronics / |
Includes bibliographical references and index.
1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.
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