Introductory MEMS : (Record no. 454062)

MARC details
000 -LEADER
fixed length control field 01183cam a22002417a 4500
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9780387095103 (hbk.)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0387095101 (hbk.)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9780387095110 (ebk.)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 038709511X (ebk.)
082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.381 ADA/I
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Adams, Thomas M.
245 10 - TITLE STATEMENT
Title Introductory MEMS :
Remainder of title fabrication and applications /
Statement of responsibility, etc. Thomas M. Adams, Richard A. Layton.
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. New York :
Name of publisher, distributor, etc. Springer,
Date of publication, distribution, etc. c2010.
300 ## - PHYSICAL DESCRIPTION
Extent xv, 444 p. :
Other physical details ill. (some col.) ;
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc. note Includes bibliographical references and index.
505 0# - FORMATTED CONTENTS NOTE
Formatted contents note 1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Microelectromechanical systems.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Electronic apparatus and appliances.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Transducers.
650 07 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element MEMS.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Layton, Richard A.
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Book
Holdings
Withdrawn status Lost status Damaged status Not for loan Collection code Home library Current library Shelving location Date acquired Total Checkouts Full call number Barcode Date last seen Date last checked out Price effective from Koha item type
        Non-fiction Dept. of Optoelectronics Dept. of Optoelectronics Processing Center 03/05/2021 1 621.381 ADA/I DOP2727 18/04/2024 06/12/2023 03/05/2021 Book