Introductory MEMS : (Record no. 454062)
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000 -LEADER | |
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fixed length control field | 01183cam a22002417a 4500 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 9780387095103 (hbk.) |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 0387095101 (hbk.) |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 9780387095110 (ebk.) |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 038709511X (ebk.) |
082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 621.381 ADA/I |
100 1# - MAIN ENTRY--PERSONAL NAME | |
Personal name | Adams, Thomas M. |
245 10 - TITLE STATEMENT | |
Title | Introductory MEMS : |
Remainder of title | fabrication and applications / |
Statement of responsibility, etc. | Thomas M. Adams, Richard A. Layton. |
260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
Place of publication, distribution, etc. | New York : |
Name of publisher, distributor, etc. | Springer, |
Date of publication, distribution, etc. | c2010. |
300 ## - PHYSICAL DESCRIPTION | |
Extent | xv, 444 p. : |
Other physical details | ill. (some col.) ; |
504 ## - BIBLIOGRAPHY, ETC. NOTE | |
Bibliography, etc. note | Includes bibliographical references and index. |
505 0# - FORMATTED CONTENTS NOTE | |
Formatted contents note | 1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Microelectromechanical systems. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Electronic apparatus and appliances. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Transducers. |
650 07 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | MEMS. |
700 1# - ADDED ENTRY--PERSONAL NAME | |
Personal name | Layton, Richard A. |
942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
Koha item type | Book |
Withdrawn status | Lost status | Damaged status | Not for loan | Collection code | Home library | Current library | Shelving location | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Date last checked out | Price effective from | Koha item type |
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Non-fiction | Dept. of Optoelectronics | Dept. of Optoelectronics | Processing Center | 03/05/2021 | 1 | 621.381 ADA/I | DOP2727 | 18/04/2024 | 06/12/2023 | 03/05/2021 | Book |