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Handbook of semiconductor manufacturing technology / edited by Yoshio Nishi, Robert Doering ; assistant editor, Tim Wooldrige.

Contributor(s): Material type: TextTextPublication details: New York : Marcel Dekker, c2000.Description: xiv, 1157 p. : illISBN:
  • 0824787838 (alk. paper)
Subject(s): DDC classification:
  • 621.38152
Online resources:
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Holdings
Item type Current library Home library Collection Call number Status Date due Barcode
Book Book Dept. of Optoelectronics Processing Center Dept. of Optoelectronics Reference 621.38152 NIS/H (Browse shelf(Opens below)) Available DOP891

Includes bibliographical references and index.

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