Handbook of semiconductor manufacturing technology / (Record no. 453448)

MARC details
000 -LEADER
fixed length control field 00703cam a22001814a 4500
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0824787838 (alk. paper)
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.38152
245 00 - TITLE STATEMENT
Title Handbook of semiconductor manufacturing technology /
Statement of responsibility, etc. edited by Yoshio Nishi, Robert Doering ; assistant editor, Tim Wooldrige.
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. New York :
Name of publisher, distributor, etc. Marcel Dekker,
Date of publication, distribution, etc. c2000.
300 ## - PHYSICAL DESCRIPTION
Extent xiv, 1157 p. :
Other physical details ill. ;
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc. note Includes bibliographical references and index.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Semiconductors
Form subdivision Handbooks, manuals, etc.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Semiconductor industry
Form subdivision Handbooks, manuals, etc.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Nishi, Yoshio,
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Doering, Robert,
856 42 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="http://www.loc.gov/catdir/enhancements/fy0647/00055564-d.html">http://www.loc.gov/catdir/enhancements/fy0647/00055564-d.html</a>
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Book
Holdings
Withdrawn status Lost status Damaged status Not for loan Collection code Home library Current library Shelving location Date acquired Total Checkouts Full call number Barcode Date last seen Price effective from Koha item type
        Reference Dept. of Optoelectronics Dept. of Optoelectronics Processing Center 12/03/2020   621.38152 NIS/H DOP891 06/01/2022 12/03/2020 Book