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Optical inspection of microsystems / edited by Wolfgang Osten.

Contributor(s): Material type: TextTextSeries: Publication details: Boca Raton, FL : CRC/Taylor & Francis, c2007.Description: 503 p., [8] p. of plates : ill. (some col.)ISBN:
  • 0849336821 (alk. paper)
  • 9780849336829
Subject(s): DDC classification:
  • 670.42/5
Online resources:
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Holdings
Item type Current library Home library Call number Status Date due Barcode
Book Book Dept. of Optoelectronics Processing Center Dept. of Optoelectronics 670.425 OST/O (Browse shelf(Opens below)) Available DOP1556

Includes bibliographical references and index.

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