Optical inspection of microsystems /
Optical inspection of microsystems /
edited by Wolfgang Osten.
- Boca Raton, FL : CRC/Taylor & Francis, c2007.
- 503 p., [8] p. of plates : ill. (some col.) ;
- Optical science and engineering ; .
Includes bibliographical references and index.
0849336821 (alk. paper) 9780849336829
Microelectromechanical systems
Quality control
Optical measurements.
Industrial microscopy.
670.42/5
Includes bibliographical references and index.
0849336821 (alk. paper) 9780849336829
Microelectromechanical systems
Quality control
Optical measurements.
Industrial microscopy.
670.42/5