Konuma, Mitsuharu <br/><br/>
Film Deposition by Plasma Techniques/ 
Mitsuharu Konuma 
 - New York:  Springer- Verlag,  1992 
 - ix, 224p.: 
 - Springer Series on Atoms and Plasmas .
<br/><br/><label>ISBN: </label>9783642845130 
<br/><br/><label>Subjects--Topical Terms: </label>--The Plasma State Mitsuharu Konuma Pages 1-10 Reactions in Plasmas Mitsuharu Konuma Pages 11-48 Generation of Cold Plasma Mitsuharu Konuma Pages 49-73 Plasma Diagnostics Mitsuharu Konuma Pages 74-106 Cold Plasma and Thin Film Formation Mitsuharu Konuma Pages 107-125 Physical Vapor Deposition Under Plasma Conditions Mitsuharu Konuma Pages 126-148 Chemical Vapor Deposition Under Plasma Conditions Mitsuharu Konuma Pages 149-184 Surface Modification by Cold Plasma Mitsuharu Konuma Pages 185-194 Back Matter Pages 195-224
<br/><br/><label>Dewey Class. No.: </label>621.3815  / KON/F