Normal view
MARC view
The Plasma State Mitsuharu Konuma Pages 1-10 Reactions in Plasmas Mitsuharu Konuma Pages 11-48 Generation of Cold Plasma Mitsuharu Konuma Pages 49-73 Plasma Diagnostics Mitsuharu Konuma Pages 74-106 Cold Plasma and Thin Film Formation Mitsuharu Konuma Pages 107-125 Physical Vapor Deposition Under Plasma Conditions Mitsuharu Konuma Pages 126-148 Chemical Vapor Deposition Under Plasma Conditions Mitsuharu Konuma Pages 149-184 Surface Modification by Cold Plasma Mitsuharu Konuma Pages 185-194 Back Matter Pages 195-224(Topical Term)
Machine generated authority record
Work cat.: (OSt)752975: Konuma, Mitsuharu 4303, Film Deposition by Plasma Techniques/, 1992
