Film Deposition by Plasma Techniques/ (Record no. 752975)

MARC details
000 -LEADER
fixed length control field 01053nam a2200193 4500
003 - CONTROL NUMBER IDENTIFIER
control field OSt
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20251106125201.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 251106b |||||||| |||| 00| 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9783642845130
040 ## - CATALOGING SOURCE
Transcribing agency kul
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.3815
Item number KON/F
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Konuma, Mitsuharu
9 (RLIN) 4303
245 ## - TITLE STATEMENT
Title Film Deposition by Plasma Techniques/
Statement of responsibility, etc. Mitsuharu Konuma
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. New York:
Name of publisher, distributor, etc. Springer- Verlag,
Date of publication, distribution, etc. 1992
300 ## - PHYSICAL DESCRIPTION
Extent ix, 224p.:
440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE
Title Springer Series on Atoms and Plasmas
9 (RLIN) 4304
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Form subdivision The Plasma State Mitsuharu Konuma Pages 1-10 Reactions in Plasmas Mitsuharu Konuma Pages 11-48 Generation of Cold Plasma Mitsuharu Konuma Pages 49-73 Plasma Diagnostics Mitsuharu Konuma Pages 74-106 Cold Plasma and Thin Film Formation Mitsuharu Konuma Pages 107-125 Physical Vapor Deposition Under Plasma Conditions Mitsuharu Konuma Pages 126-148 Chemical Vapor Deposition Under Plasma Conditions Mitsuharu Konuma Pages 149-184 Surface Modification by Cold Plasma Mitsuharu Konuma Pages 185-194 Back Matter Pages 195-224
9 (RLIN) 4305
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Source of classification or shelving scheme Dewey Decimal Classification
Koha item type Book
Holdings
Withdrawn status Lost status Source of classification or shelving scheme Damaged status Not for loan Home library Current library Shelving location Date acquired Total Checkouts Full call number Barcode Date last seen Price effective from Koha item type
    Dewey Decimal Classification     Dept. of Optoelectronics Dept. of Optoelectronics New Materials Shelf 06/11/2025   621.3815 KON/F DOP3759 06/11/2025 06/11/2025 Book