000 00320nam a2200121Ia 4500
001 19710
008 170722s9999 xx 000 0 und d
100 _aMayer, James W. Etc
245 _aIon implantation in semiconductors :
_bsilicon and germanium, eng /
260 _c1970.
653 _aElectron Physics
942 _cGEN
999 _c80329
_d80329