| 000 | 00327nam a22001217a 4500 | ||
|---|---|---|---|
| 020 | _a9780470174470 | ||
| 082 | _a621.381 | ||
| 100 | _aIrene, Eugene. A. | ||
| 245 | _aSurfaces, Interfaces, and Thin Films for Microelectronics/ | ||
| 260 |
_aNew Jersey: _bJohn Wiley & Sons, _c2008. |
||
| 300 | _axiii, 515p. | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c742403 _d742403 |
||