| 000 | 00370nam a22001217a 4500 | ||
|---|---|---|---|
| 020 | _a978-1-4200-5516-0 | ||
| 082 |
_a681.2 _bMAD/F |
||
| 100 | _aMadou, Marc J. | ||
| 245 |
_aFundamentals of Microfabrication and Nanotechnology vol.III: _bFrom MEMS to Bio-MEMS and Bio- NEMS; _cMadou, Marc J. |
||
| 260 |
_aLondon, _bCRC PRESS, _c2012. |
||
| 300 | _aIX,638P., | ||
| 942 | _cBK | ||
| 999 |
_c695667 _d695667 |
||