| 000 | 00411nam a22001217a 4500 | ||
|---|---|---|---|
| 020 | _a978-1-4200-5511-5 | ||
| 082 |
_a681.2 _bMAD/F |
||
| 100 | _aMadou, Marc J | ||
| 245 |
_aFundamentals of Microfabrication and Nanotechnology: _bSolid- state Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology; _cMadou, Marc J |
||
| 260 |
_aLondon; _bCRC Press, _c2012. |
||
| 300 | _avii,641p. | ||
| 942 | _cBK | ||
| 999 |
_c695659 _d695659 |
||