000 | 00306nam a22001217a 4500 | ||
---|---|---|---|
020 | _a978-1-4757-7458-0 | ||
082 |
_a621.3 _bSEN/M |
||
100 | _aSenturia,Stephen D. | ||
245 |
_aMicrosystem design; _cSenturia,Stephen D. |
||
260 |
_aNew York; _bSpringer, _c2001. |
||
300 | _axviii,689 p.; | ||
942 | _cBK | ||
999 |
_c690855 _d690855 |