000 | 00452cam a2200145 4500 | ||
---|---|---|---|
020 | _a0444104887 (American Elsevier) | ||
082 | 0 | 0 | _a530.41 DEA/I |
245 | 0 | 0 |
_aIon implantation/ _cby G. Dearnaley [and others] |
260 |
_aAmsterdam, _bNorth-Holland Pub. Co.; _aNew York, _b:American Elsevier, _c,1973. |
||
300 | _axv, 802 p. with illus. | ||
504 | _aIncludes bibliographies. | ||
650 | 0 | _aIon implantation. | |
700 | 1 | _aDearnaley, G. | |
942 | _cBK | ||
999 |
_c670748 _d670748 |