000 00452cam a2200145 4500
020 _a0444104887 (American Elsevier)
082 0 0 _a530.41 DEA/I
245 0 0 _aIon implantation/
_cby G. Dearnaley [and others]
260 _aAmsterdam,
_bNorth-Holland Pub. Co.;
_aNew York,
_b:American Elsevier,
_c,1973.
300 _axv, 802 p. with illus.
504 _aIncludes bibliographies.
650 0 _aIon implantation.
700 1 _aDearnaley, G.
942 _cBK
999 _c670748
_d670748