000 00305nam a22000977a 4500
100 _aJyothika, A.S.
245 _aEllipsometric study od silicon nitrade anti-reflection coating
260 _aThiruvananthapuram:
_bDept. of Physics; University of Kerala,
_c2021.
700 _aDr.Jayakrishnan,R.
942 _cPD
999 _c636658
_d636658