000			01095nam a22001577a 4500
020			_a9788179928998
082			_a621.381531 _bHEL/H
100			_aHelbert,John N,ed.
245			_aHandbook of VLSI microlithography : _bprinciples, technology, and applications/ _cedited by John N .Helbert
260			_aDelhi: _bJAICO Publishing House, _c2008
300			_axix,1001p.
520			_a This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line e
650			_aMicrolithography
650			_aIntegrated Circuits _vVery large scale Integration
942			_cBK
999			_c613496 _d613496