000 | 00411nam a2200181 4500 | ||
---|---|---|---|
020 |
_a9781852331443 _c |
||
082 | _aR 530.44 CHE-P | ||
100 | _aCheung, Kin P | ||
245 | _aPlasma charging damage | ||
250 | _a | ||
260 |
_aSpringer Publishing Co., New York _c1999 |
||
300 | _a346 | ||
490 | _a | ||
500 | _a | ||
590 |
_a _b _c |
||
650 | _aPlasma physics; Properties of matter | ||
942 | _cBK | ||
999 |
_c481719 _d481719 |