000 00411nam a2200181 4500
020 _a9781852331443
_c
082 _aR 530.44 CHE-P
100 _aCheung, Kin P
245 _aPlasma charging damage
250 _a
260 _aSpringer Publishing Co., New York
_c1999
300 _a346
490 _a
500 _a
590 _a
_b
_c
650 _aPlasma physics; Properties of matter
942 _cBK
999 _c481719
_d481719