| 000 | 00417nam a2200181 4500 | ||
|---|---|---|---|
| 020 |
_a9780471330011 _c |
||
| 082 | _a671.735 MAH-P | ||
| 100 | _aMahan, John E | ||
| 245 | _aPhysical vapor deposition of thin films | ||
| 250 | _a | ||
| 260 |
_aJohn Wiley & Sons Inc., New York _c2000 |
||
| 300 | _a312 | ||
| 490 | _a | ||
| 500 | _a | ||
| 590 |
_arvr _b _c |
||
| 650 | _aPhysical vapor deposition | ||
| 942 | _cBK | ||
| 999 |
_c481338 _d481338 |
||