000 00433nam a2200181 4500
020 _a
_c
082 _a530.4275 VIS-P
100 _aVishnyakov, B A; Osipov, K A
245 _aProduction of thin films of chemical compounds by electron beam bombardment
250 _a
260 _aNauka Publishers, Moscow
_c1970
300 _a104
490 _a
500 _a
590 _arvr
_b
_c
650 _aThin films
942 _cBK
999 _c478441
_d478441