000			00548cam a22001817a 4500
020			_a3540313338 (hbk. alk. paper)
020			_a9783540313335 (hbk. alk. paper)
082	0	0	_a621.36
100	1		_aUkita, H.
245	1	0	_aMicromechanical photonics / _cH. Ukita.
260			_aBerlin : _bSpringer-Verlag, _cc2006.
300			_axi, 250 p. : _bill. ;
504			_aIncludes bibliographical references (p. [227]-242) and index.
650		0	_aPhotonics.
650		0	_aMicroelectronics.
650		0	_aMicroelectromechanical systems.
942			_cBK
999			_c454253 _d454253