000			01183cam a22002417a 4500
020			_a9780387095103 (hbk.)
020			_a0387095101 (hbk.)
020			_a9780387095110 (ebk.)
020			_a038709511X (ebk.)
082	0	4	_a621.381 ADA/I
100	1		_aAdams, Thomas M.
245	1	0	_aIntroductory MEMS : _bfabrication and applications / _cThomas M. Adams, Richard A. Layton.
260			_aNew York : _bSpringer, _cc2010.
300			_axv, 444 p. : _bill. (some col.) ;
504			_aIncludes bibliographical references and index.
505	0		_a1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.
650		0	_aMicroelectromechanical systems.
650		0	_aElectronic apparatus and appliances.
650		0	_aTransducers.
650	0	7	_aMEMS.
700	1		_aLayton, Richard A.
942			_cBK
999			_c454062 _d454062