000			00441cam a2200169 a 4500
020			_a9780819475602
082	0	0	_a621.381531
100	1		_aLin, Burn Jeng,
245	1	0	_aOptical lithography : _bhere is why / _cBurn J. Lin.
260			_aBellingham, Wash. : _bSPIE, _cc2009.
300			_axiv, 477 p. : _bill. ;
500			_aIncludes index.
650		0	_aMicrolithography.
650		0	_aSemiconductors
650		0	_aLasers
942			_cBK
999			_c454049 _d454049