| 000 | 00703cam a22001814a 4500 | ||
|---|---|---|---|
| 020 | _a0824787838 (alk. paper) | ||
| 082 | 0 | 0 | _a621.38152 |
| 245 | 0 | 0 |
_aHandbook of semiconductor manufacturing technology / _cedited by Yoshio Nishi, Robert Doering ; assistant editor, Tim Wooldrige. |
| 260 |
_aNew York : _bMarcel Dekker, _cc2000. |
||
| 300 |
_axiv, 1157 p. : _bill. ; |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aSemiconductors _vHandbooks, manuals, etc. |
|
| 650 | 0 |
_aSemiconductor industry _vHandbooks, manuals, etc. |
|
| 700 | 1 | _aNishi, Yoshio, | |
| 700 | 1 | _aDoering, Robert, | |
| 856 | 4 | 2 | _uhttp://www.loc.gov/catdir/enhancements/fy0647/00055564-d.html |
| 942 | _cBK | ||
| 999 |
_c453448 _d453448 |
||