000			00540cam a22001814a 4500
999			_c453399 _d453399
020			_a9783540745587 (hardcover : alk. paper)
082	0	0	_a621.3815
245	0	0	_aInto the nano era / _cHoward Huff, editor.
260			_aBerlin : _bSpringer, _cc2009.
300			_axxviii, 343 p. : _bill. ;
490	0		_aSpringer series in materials science ;
504			_aIncludes bibliographical references and index.
650		0	_aIntegrated circuits
650		0	_aSilicon
650		0	_aSemiconductors
700	1		_aHuff, Howard R.
942			_cBK