| 000 | 00317nam a22001097a 4500 | ||
|---|---|---|---|
| 020 | _a9783527310807 | ||
| 082 | _a621.3815 BRA/C | ||
| 245 |
_aCMOS-MEMS. Vol. 2: _cedited by O.Brand and G.K.Fedder _bAdvanced Micro and Nanosystems/ |
||
| 260 |
_aGermany _bwiley-vch |
||
| 505 | _amaterial characterization | ||
| 942 | _cBK | ||
| 999 |
_c452735 _d452735 |
||