000			00760cam a22002174a 4500
999			_c452715 _d452715
020			_a0849336821 (alk. paper)
020			_a9780849336829
082	0	0	_a670.42/5
245	0	0	_aOptical inspection of microsystems / _cedited by Wolfgang Osten.
260			_aBoca Raton, FL : _bCRC/Taylor & Francis, _cc2007.
300			_a503 p., [8] p. of plates : _bill. (some col.) ;
490	1		_aOptical science and engineering ;
504			_aIncludes bibliographical references and index.
650		0	_aMicroelectromechanical systems
650		0	_aQuality control
650		0	_aOptical measurements.
650		0	_aIndustrial microscopy.
700	1		_aOsten, Wolfgang.
856	4	2	_uhttp://www.loc.gov/catdir/enhancements/fy0648/2005046670-d.html
942			_cBK