| 000 | 00430nam a2200181 4500 | ||
|---|---|---|---|
| 020 |
_a9798181282025 _c595 |
||
| 082 | _a620.115 FUJ-M | ||
| 100 | _aFujita, H | ||
| 245 | _aMicromachines as tools for nanotechnology | ||
| 250 | _a | ||
| 260 |
_aSpringer (India) Pvt Ltd., New Delhi _c2004 |
||
| 300 | _a211 | ||
| 490 | _a | ||
| 500 | _a | ||
| 590 |
_aVMV _b _c595 |
||
| 650 | _aMicroelectromechanical systems | ||
| 942 | _cBK | ||
| 999 |
_c452341 _d452341 |
||