000			00774cam a22002297a 4500
999			_c452339 _d452339
020			_a9781466554054 (cloth : acidfree paper)
020			_a1466554053 (cloth : acidfree paper)
082	0	4	_a621.4
245	0	0	_aModeling and control for micro/nano devices and systems / _cedited by Ning Xi, Mingjun Zhang, Guangyong Li.
260			_aBoca Raton : _bCRC Press, _cc2014.
300			_axii, 163 p. : _bill. ;
490	1		_aAutomation and control engineering
504			_aIncludes bibliographical references and index.
650		0	_aMicroelectromechanical systems.
650		0	_aNanoelectromechanical systems.
650		0	_aSystems biology.
650		7	_aTechnology.
700	1		_aXi, Ning.
700	1		_aZhang, Mingjun.
700	1		_aLi, Guangyong.
942			_cBK