000			01602cam a22002417a 4500
020			_a9780387462813 (alk. paper)
020			_a0387462813 (alk. paper)
020			_a9780387462837 (eISBN)
082	0	4	_a620.115
245	0	0	_aBioNanoFluidic MEMS / _cPeter J. Hesketh, editor.
260			_aNew York : _bSpringer, _c2008.
300			_ax, 295 p. : _bill. ;
490	0		_aMEMS reference shelf
500			_aReprinted as softcover in 2010.
504			_aIncludes bibliographical references and index.
505	0		_aNanotechnology: retrospect and prospect / James D. Meindl -- Synthesis of oxide nanostructures / Chenguo Hu, Hong Liu, and Zhong Lin Wang -- Nanolithography / Raghunath Murali -- Nano/microfabrication methods for sensors and NEMS/MEMS / Peter J. Hesketh -- Micro- and nanomanufacturing via molding / Harry D. Rowland and William P. King -- Temperature measurement of microdevices using thermoreeflectance and raman thermometry / Thomas Beechem and Samuel Graham -- Stereolithography and rapid prototyping / David W. Rosen -- Case studies in chemical sensor development / Gary W. Hunter, Jennifer C. Xu, and Darby B. Makel -- Engineered nanopores / Amir G. Ahmadi and Sankar Nair -- Engineering biomaterial interfaces through micro and nano-patterning / Joseph L. Charest and William P. King -- Biosensors micro and nano integration / Ravi Doraiswami.
650		0	_aMicroelectromechanical systems.
650		0	_aNanotechnology--OXIDE nanostructures--nanolithography--chemical sensor
650		0	_aBiotechnology.
650	0	7	_aMEMS.
700	1		_aHesketh, P. J.
942			_cBK
999			_c452293 _d452293