| 000 | 00616cam a22002057i 4500 | ||
|---|---|---|---|
| 999 |
_c452166 _d452166 |
||
| 020 | _a9780815515937 | ||
| 020 | _a0815515936 | ||
| 082 | 0 | 4 | _a621.381 |
| 100 | 1 | _aSarkar, Jaydeep | |
| 245 | 1 | 0 |
_aSputtering materials for VLSI and thin film devices / _cJaydeep Sarkar. |
| 300 |
_ax, 603 pages : _billustrations ; |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aMicroelectronics | |
| 650 | 0 | _aCathode sputtering (Plating process) | |
| 650 | 0 | _aIntegrated circuits | |
| 650 | 0 | _aThin film devices | |
| 650 | 0 | _aFlat panel displays | |
| 650 | 0 | _aSputtering (Physics) | |
| 942 | _cBK | ||