| 000 | 00418nam a2200133 4500 | ||
|---|---|---|---|
| 020 |
_a9 _c19175.0 |
||
| 082 | _aR 621.381 531 FEL/N | ||
| 100 | _aFeldman,Martin,Ed. | ||
| 245 | _aNanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems | ||
| 250 | _a | ||
| 260 |
_bWoodhead publihing ltd , Cambridge _c2014 |
||
| 590 |
_aTechniz books international, New Delhi _b" _d |
||
| 942 | _cREF | ||
| 999 |
_c451155 _d451155 |
||