| 000 | 00394nam a2200133 4500 | ||
|---|---|---|---|
| 020 |
_a _cvolumes |
||
| 082 | _a620.5 MAD/F.2 | ||
| 100 | _aMadou,MarcJ | ||
| 245 | _aFundamentals of Microfabrication and nanotechnology:Manufacturing techniques for microfabrication and nanotechnology, Volume2 | ||
| 250 | _a3 Edition | ||
| 260 |
_bCRC Press _c2012 |
||
| 590 |
_aArunima Books _b _d |
||
| 942 | _cBK | ||
| 999 |
_c450860 _d450860 |
||