| 000 | 00416nam a2200133 4500 | ||
|---|---|---|---|
| 020 |
_a _cFor three |
||
| 082 | _a620.5 MAD/F.1 | ||
| 100 | _aMadou,MarcJ | ||
| 245 | _aFundamentals of Microfabrication and nanotechnology:Solid-state physics,fluidics, and analytical techniques in micro and nanotechnology, Volume1 | ||
| 250 | _a3 Edition | ||
| 260 |
_bCRC Press _c2012 |
||
| 590 |
_aArunima Books _b _d |
||
| 942 | _cBK | ||
| 999 |
_c450859 _d450859 |
||